Cited Article: Ghosh, S. Carbon nanotube flow sensors
Alert Expires: 09 NOV 2010
Number of Citing Articles: 1 new records this week (1 in this e-mail)
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Title:
Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement
Authors:
Chow, WWY; Qu, YL; Li, WJ; Tung, SCH
Author Full Names:
Chow, Winnie W. Y.; Qu, Yanli; Li, Wen J.; Tung, Steve C. H.
Source:
MICROFLUIDICS AND NANOFLUIDICS 8 (5): 631-640 MAY 2010
Language:
English
Document Type:
Article
Author Keywords:
Carbon nanotubes; CNT sensors; Micro-flow sensor; Micro shear-stress sensor
Abstract:
We have developed SWCNT sensors for air-flow shear-stress measurement inside a polymethylmethacrylate (PMMA) "micro-wind tunnel" chip. An array of sensors is fabricated by using dielectrophoretic (DEP) technique to manipulate bundled single-walled carbon nanotubes (SWCNTs) across the gold microelectrodes on a PMMA substrate. The sensors are then integrated in a PMMA micro-wind tunnel, which is fabricated by SU-8 molding/hot-embossing technique. Since the sensors detect air flow by thermal transfer principle, we have first examined the I-V characteristics of the sensors and confirmed that self-heating effect occurs when the input voltage is above similar to 1 V. We then performed the flow sensing experiment on the sensors using constant temperature (CT) configuration with input power of similar to 230 mu W. The voltage output of the sensors increases with the increasing flow rate in the micro-wind tunnel and the detectable volumetric flow is in the order of 1 x 10(-5)m(3)/s. !
We also found that the activation power of the sensors has a linear relation with 1/3 exponential power of the shear stress which is similar to conventional hot-wire and polysilicon types of convection-based shear-stress sensors. Moreover, measurements of sensors with different overheat ratios were compared, and results showed that sensor is more sensitive to the flow with a higher overheat ratio.
Reprint Address:
Li, WJ, Chinese Univ Hong Kong, Ctr Micro & Nano Syst, William MW Mong Engn Bldg, Shatin, Hong Kong, Peoples R China.
Research Institution addresses:
[Chow, Winnie W. Y.; Li, Wen J.] Chinese Univ Hong Kong, Ctr Micro & Nano Syst, Shatin, Hong Kong, Peoples R China; [Qu, Yanli; Li, Wen J.; Tung, Steve C. H.] Chinese Acad Sci, State Key Lab Robot, Shenyang Inst Automat, Shenyang, Peoples R China; [Tung, Steve C. H.] Univ Arkansas, Dept Mech Engn, Fayetteville, AR 72701 USA
E-mail Address:
wen@mae.cuhk.edu.hk
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Cited Reference Count:
23
Times Cited:
0
Publisher:
SPRINGER HEIDELBERG; TIERGARTENSTRASSE 17, D-69121 HEIDELBERG, GERMANY
Subject Category:
Nanoscience & Nanotechnology; Instruments & Instrumentation; Physics, Fluids & Plasmas
ISSN:
1613-4982
DOI:
10.1007/s10404-009-0495-5
IDS Number:
580TW
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